Design and Fabrication of Mems Area Changed Capacitive Accelerometer Using Fdm 3D Printing Technique and Vibration Test Based Mechanical Characterization

Abstract

This work presents the design, fabrication and testing of a MEMS (Microelectronics and Mechanical Systems) area-change capacitive type accelerometer. The need for rapid production of mechanical components and replacements has become increasingly important, driving the growth of fast prototyping and additive manufacturing across various industries, including sensor manufacturing. Authors used the FDM 3D Printing Technology for the design. A key requirement for FDM 3D printing is that all material dimensions must be in millimeters. Authors developed the area changed capacitive accelerometer and performed several simulation analyses. The fabricated device produced a displacement = 2.13mm along X-axis, natural frequency = 19.292 Hz, noise floor = 0.063 Hzng / and voltage outline = 1.417 Volts for g = 50. The cross axis sensitivity is 7.01% only even for very high acceleration range (0–50g). The simulation analysis are performed using COMSOL multiphysics software. The authors tested the 3D-printed device for frequency and displacement across all three axes using a vibration shaker, and most of the results showed close agreement with the theoretical values.MEMS